Invention Grant
- Patent Title: Electrical passive elements of an ESD power clamp in a backside back end of line (B-BEOL) process
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Application No.: US18210472Application Date: 2023-06-15
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Publication No.: US12087761B2Publication Date: 2024-09-10
- Inventor: Yu-Hung Yeh , Wun-Jie Lin , Jam-Wem Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L23/522 ; H01L23/535 ; H02H9/04

Abstract:
An electrostatic discharge (ESD) protection apparatus and method for fabricating the same are disclosed herein. In some embodiments, the ESD protection apparatus, comprises: a plurality of transistors patterned on a semiconductor substrate during a front-end-of-line (FEOL) process, metal interconnects formed on top of the plurality of transistors during a back-end-of-line (BEOL) process and configured to interconnect the plurality of transistors, and a plurality of passive components formed under the semiconductor substrate in a backside layer during a backside a back-end-of-line (B-BEOL) process, wherein the plurality of passive components are connected to the plurality of transistors through a plurality of vias.
Public/Granted literature
- US20230326920A1 ELECTRICAL PASSIVE ELEMENTS OF AN ESD POWER CLAMP IN A BACKSIDE BACK END OF LINE (B-BEOL) PROCESS Public/Granted day:2023-10-12
Information query
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