- 专利标题: Memory device and method of forming the same
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申请号: US17400081申请日: 2021-08-11
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公开(公告)号: US12089414B2公开(公告)日: 2024-09-10
- 发明人: Bo-Feng Young , Sai-Hooi Yeong , Shih-Lien Linus Lu , Chia-En Huang , Yih Wang , Yu-Ming Lin
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H10B51/20
- IPC分类号: H10B51/20 ; G11C5/06 ; G11C11/22
摘要:
Provided are a memory device and a method of forming the same. The memory device includes a substrate, a multi-layer stack, a plurality of memory cells, and a plurality of conductive contacts. The substrate includes an array region and a staircase region. The multi-layer stack is disposed on the substrate in the array region, wherein the multi-layer stack has an end portion extending on the staircase region to be shaped into a staircase structure. The plurality of memory cells are respectively disposed on sidewalls of the multi-layer stack in the array region, and arranged at least along a stacking direction of the multi-layer stack. The plurality of conductive contacts are respectively on the staircase structure. At least two conductive contacts are electrically connected to each other.
公开/授权文献
- US20220231050A1 MEMORY DEVICE AND METHOD OF FORMING THE SAME 公开/授权日:2022-07-21
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