- 专利标题： Nozzle inspection method, nozzle inspection apparatus, and substrate processing apparatus including the same
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申请号： US17870835申请日： 2022-07-22
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公开(公告)号： US12090754B2公开(公告)日： 2024-09-17
- 发明人: Sang Uk Son , Yong Tak Hyun , Dae Sung Kim
- 申请人： SEMES CO., LTD.
- 申请人地址： KR Chungcheongnam-do
- 专利权人： SEMES CO., LTD.
- 当前专利权人： SEMES CO., LTD.
- 当前专利权人地址： KR Chungcheongnam-Do
- 代理机构： Womble Bond Dickinson (US) LLP
- 优先权： KR 20210111462 2021.08.24
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
Provided are a nozzle inspection method and a nozzle inspection apparatus capable of accurately detecting a defect in an inkjet head nozzle within a short time. The nozzle inspection method comprises discharging a plurality of droplets into a first region of interest of a substrate using a first nozzle to form an inspection pattern, and determining whether the first nozzle is defective based on the inspection pattern.
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