Invention Grant
- Patent Title: Transistor circuits including fringeless transistors and method of making the same
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Application No.: US17316015Application Date: 2021-05-10
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Publication No.: US12094944B2Publication Date: 2024-09-17
- Inventor: Dai Iwata , Hiroshi Nakatsuji , Hiroyuki Ogawa , Eiichi Fujikura
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L27/06 ; H01L27/07 ; H01L29/40 ; H01L29/423 ; H01L29/66

Abstract:
A field effect transistor includes a gate dielectric and a gate electrode overlying an active region and contacting a sidewall of a trench isolation structure. The transistor may be a fringeless transistor in which the gate electrode does not overlie a portion of the trench isolation region. A planar dielectric spacer plate and a conductive gate cap structure may overlie the gate electrode. The conductive gate cap structure may have a z-shaped vertical cross-sectional profile to contact the gate electrode and to provide a segment overlying the planar dielectric spacer plate. Alternatively or additionally, a conductive gate connection structure may be provided to provide electrical connection between two electrodes of adjacent field effect transistors.
Public/Granted literature
- US20220359690A1 TRANSISTOR CIRCUITS INCLUDING FRINGELESS TRANSISTORS AND METHOD OF MAKING THE SAME Public/Granted day:2022-11-10
Information query
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