Invention Grant
- Patent Title: Integrated optical filter and photodetector and methods of fabricating the same
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Application No.: US17073152Application Date: 2020-10-16
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Publication No.: US12094987B2Publication Date: 2024-09-17
- Inventor: Yuan Yuan , Zhihong Huang , Di Liang , Xiaoge Zeng
- Applicant: Hewlett Packard Enterprise Development LP
- Applicant Address: US TX Houston
- Assignee: Hewlett Packard Enterprise Development LP
- Current Assignee: Hewlett Packard Enterprise Development LP
- Current Assignee Address: US TX Spring
- Agency: Hewlett Packard Enterprise Patent Department
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; G02B6/293 ; G02B6/42 ; H01L27/144 ; H01L31/108 ; H01L31/18 ; H04B10/25 ; H04B10/50 ; H04B10/516 ; H04B10/67

Abstract:
Integrated optical filter and photodetectors and methods of fabrication thereof are described herein according to the present disclosure. An example of an integrated optical filter and photodetector described herein includes a substrate, an insulator layer on the substrate, and a semiconductor layer on the insulator layer. An optical filter having a resonant cavity is formed in or on the semiconductor layer. The integrated optical filter and photodetector further includes two first metal fingers and a second metal finger interdigitated between the two first metal fingers on the semiconductor layer forming Schottky barriers. The first metal fingers are constructed from a different metal relative to the second metal finger.
Public/Granted literature
- US20220123159A1 INTEGRATED OPTICAL FILTER AND PHOTODETECTOR AND METHODS OF FABRICATING THE SAME Public/Granted day:2022-04-21
Information query
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