Invention Grant
- Patent Title: Image sensor structure with a light guide layer and a nanowell layer
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Application No.: US17418525Application Date: 2020-09-29
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Publication No.: US12100723B2Publication Date: 2024-09-24
- Inventor: Arvin Emadi , Ali Agah , Xiuyu Cai , Craig Lee Hetherington
- Applicant: ILLUMINA, INC.
- Applicant Address: US CA San Diego
- Assignee: Illumina Inc.
- Current Assignee: Illumina Inc.
- Current Assignee Address: US CA San Diego
- Agency: Heslin Rothenberg Farley and Mesiti, P.C.
- International Application: PCT/US2020/053241 2020.09.29
- International Announcement: WO2021/071699A 2021.04.15
- Date entered country: 2021-06-25
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor structure including an image stack disposed over a device stack. The image stack includes a plurality of light detectors. A first optical filter stack is disposed over the image stack. The first optical filter stack includes a light guide layer. Light pipe cavities are disposed in the light guide layer. Each light pipe cavity is associated with a light detector. Each light pipe cavity has an aspect ratio that is greater than about 2.5 to about 1. A nanowell layer is disposed over the first optical filter stack. Nanowells are disposed in the nanowell layer. Each nanowell is associated with a light detector.
Public/Granted literature
- US20220352228A1 IMAGE SENSOR STRUCTURE Public/Granted day:2022-11-03
Information query
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