发明授权
- 专利标题: MEMS-based rotation sensor for seismic applications and sensor units having same
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申请号: US18050248申请日: 2022-10-27
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公开(公告)号: US12111434B2公开(公告)日: 2024-10-08
- 发明人: Maxime Projetti , Olivier Vancauwenberghe , Nicolas Goujon , Hans Paulson
- 申请人: Schlumberger Technology Corporation
- 申请人地址: US TX Sugar Land
- 专利权人: SCHLUMBERGER TECHNOLOGY CORPORATION
- 当前专利权人: SCHLUMBERGER TECHNOLOGY CORPORATION
- 当前专利权人地址: US TX Sugar Land
- 代理商 Jeffrey D. Frantz
- 分案原申请号: US15407241 2017.01.16
- 主分类号: G01V1/16
- IPC分类号: G01V1/16 ; G01P15/125 ; G01V1/00 ; G01V1/18 ; G01V1/38 ; G01C19/5712
摘要:
The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
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