Invention Grant
- Patent Title: Fringe capacitor, integrated circuit and manufacturing process for the fringe capacitor
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Application No.: US17137784Application Date: 2020-12-30
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Publication No.: US12113062B2Publication Date: 2024-10-08
- Inventor: Naveen Tipirneni , Maik Peter Kaufmann , Michael Lueders , Jungwoo Joh
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Yudong Kim; Frank D. Cimino
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L21/8252 ; H01L29/20 ; H01L29/66 ; H01L29/778 ; H01L49/02 ; H02M3/156 ; H03K3/037
Abstract:
The present invention provides a capacitor having a first structure made of a metal layer and a second structure made of the same metal layer and a dielectric layer between the first and the second metal structure, wherein the dielectric layer has a relative permittivity greater than 4, in particular greater than 6. It also provides a monolithically integrated circuit including such a capacitor and optionally other components. A method of manufacturing such a capacitor is also provided.
Public/Granted literature
- US20220208755A1 FRING CAPACITOR, INTEGRATED CIRCUIT AND MANUFACTURING PROCESS FOR THE FRINGE CAPACITOR Public/Granted day:2022-06-30
Information query
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