Invention Grant
- Patent Title: Parallelism-adjustable bonding machine
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Application No.: US17730588Application Date: 2022-04-27
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Publication No.: US12125721B2Publication Date: 2024-10-22
- Inventor: Jing-Cheng Lin , Jung-Hua Chang , Mao-Chan Chang
- Applicant: SKY TECH INC.
- Applicant Address: TW Hsinchu
- Assignee: SKY TECH INC.
- Current Assignee: SKY TECH INC.
- Current Assignee Address: TW Hsinchu County
- Agency: HDLS IPR SERVICES
- Agent Chun-Ming Shih
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A parallelism-adjustable bonding machine includes a first chamber, a second chamber, a press-bonding unit, a carrier and plural parallelism-adjusting units. The first chamber is configured to connect to the second chamber, so as to define a closed space therebetween. The press-bonding unit is disposed within the first chamber, and the carrier is disposed within the second chamber. The press-bonding unit is disposed to face the carrier configured to press and bond substrates placed on the carrier. Each of the parallelism-adjusting units is disposed on the first chamber, and includes an adjustment shaft extending through the first chamber and connected to the press-bonding unit. The adjustment shaft includes an adjustment member located outside the first chamber and the closed space. A user is able to adjust a parallelism between the press-bonding unit and the carrier in an efficient and precise manner, from the adjustment member.
Public/Granted literature
- US20230352323A1 PARALLELISM-ADJUSTABLE BONDING MACHINE Public/Granted day:2023-11-02
Information query
IPC分类: