Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17433728Application Date: 2020-02-17
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Publication No.: US12136674B2Publication Date: 2024-11-05
- Inventor: Shunpei Yamazaki , Toshimitsu Obonai , Junichi Koezuka , Kenichi Okazaki
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi
- Agency: NIXON PEABODY LLP
- Agent Jeffrey L. Costellia
- Priority: JP2019-037921 20190301
- International Application: PCT/IB2020/051294 WO 20200217
- International Announcement: WO2020/178651 WO 20200910
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
A semiconductor device with favorable electrical characteristics is provided. A semiconductor device with stable electrical characteristics is provided. A highly reliable display device is provided. The semiconductor device includes a first conductive layer, a first insulating layer, a semiconductor layer, and a pair of second conductive layers. The first insulating layer is in contact with a top surface of the first conductive layer. The semiconductor layer is in contact with a top surface of the first insulating layer. The pair of second conductive layers are in contact with a top surface of the semiconductor layer. The pair of second conductive layers are apart from each other in a region overlapping with the first conductive layer. The semiconductor layer contains indium and oxygen and has a composition falling within a range obtained by connecting first coordinates (1:0:0), second coordinates (2:1:0), third coordinates (14:7:1), fourth coordinates (7:2:2), fifth coordinates (14:4:21), sixth coordinates (2:0:3), and the first coordinates in this order with a straight line in a ternary diagram showing atomic ratios of indium to an element M and zinc. In addition, the element M is one or more of gallium, aluminum, yttrium, and tin.
Public/Granted literature
- US20220140144A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-05-05
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