Invention Grant
- Patent Title: Devices including stacked nanosheet transistors
-
Application No.: US17504720Application Date: 2021-10-19
-
Publication No.: US12170322B2Publication Date: 2024-12-17
- Inventor: Jeonghyuk Yim , Byounghak Hong , Jungsu Kim , Kang-ill Seo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/06 ; H01L29/66 ; H01L29/786

Abstract:
Nanosheet transistor devices are provided. A nanosheet transistor device includes a transistor stack that includes a lower nanosheet transistor having a first nanosheet width and a lower gate width. The transistor stack also includes an upper nanosheet transistor that is on the lower nanosheet transistor and that has a second nanosheet width and an upper gate width that are different from the first nanosheet width and the lower gate width, respectively. Related methods of forming a nanosheet transistor device are also provided.
Public/Granted literature
- US20220367658A1 DEVICES INCLUDING STACKED NANOSHEET TRANSISTORS Public/Granted day:2022-11-17
Information query
IPC分类: