Invention Grant
- Patent Title: Liquid amount measuring method and computer-readable recording medium
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Application No.: US18213785Application Date: 2023-06-23
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Publication No.: US12174549B2Publication Date: 2024-12-24
- Inventor: Yuichiro Kunugimoto , Shota Ueyama , Akihiro Teramoto , Yuta Nishiyama , Shinichi Hatakeyama
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JP2020-190281 20201116
- Main IPC: G01F9/00
- IPC: G01F9/00 ; B08B3/02 ; B08B13/00 ; G01G21/22 ; G03F7/00 ; G03F7/16

Abstract:
A substrate processing system includes: a measuring unit provided detachably with respect to a placement portion of a placement stage; a measuring jig for measuring a processing liquid; a liquid processing unit including a supplier which supplies the processing liquid to the measuring jig; a transfer mechanism for transferring the measuring jig between the measuring unit and the liquid processing unit; and a controller. The controller executes: a process of transferring the measuring jig in the measuring unit from the measuring unit to the liquid processing unit; a process of ejecting the processing liquid from the supplier to the measuring jig; a third process of transferring the measuring jig from the liquid processing unit to the measuring unit; and a fourth process of calculating an ejection amount of the processing liquid based on a measurement value in the measuring unit.
Public/Granted literature
- US20230418166A1 LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM Public/Granted day:2023-12-28
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