Invention Grant
- Patent Title: Image sensor with scattering structure
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Application No.: US17205158Application Date: 2021-03-18
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Publication No.: US12211871B2Publication Date: 2025-01-28
- Inventor: Cheng Yu Huang , Chun-Hao Chuang , Keng-Yu Chou , Wei-Chieh Chiang , Wen-Hau Wu , Chih-Kung Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/107

Abstract:
The present disclosure relates to an integrated chip including a substrate and a pixel. The pixel includes a photodetector. The photodetector is in the substrate. The integrated chip further includes a first inner trench isolation structure and an outer trench isolation structure that extend into the substrate. The first inner trench isolation structure laterally surrounds the photodetector in a first closed loop. The outer trench isolation structure laterally surrounds the first inner trench isolation structure along a boundary of the pixel in a second closed loop and is laterally separated from the first inner trench isolation structure. Further, the integrated chip includes a scattering structure that is defined, at least in part, by the first inner trench isolation structure and that is configured to increase an angle at which radiation impinges on the outer trench isolation structure.
Public/Granted literature
- US20220302194A1 IMAGE SENSOR WITH SCATTERING STRUCTURE Public/Granted day:2022-09-22
Information query
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