Invention Grant
- Patent Title: Ferroelectric memory device, manufacturing method of the ferroelectric memory device and semiconductor chip
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Application No.: US18298342Application Date: 2023-04-10
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Publication No.: US12238932B2Publication Date: 2025-02-25
- Inventor: Rainer Yen-Chieh Huang , Hai-Ching Chen , Yu-Ming Lin , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H01L21/28 ; H01L23/528 ; H01L29/51 ; H01L29/78 ; H10B41/23 ; H10B51/30

Abstract:
A ferroelectric memory device, a manufacturing method of the ferroelectric memory device and a semiconductor chip are provided. The ferroelectric memory device includes a gate electrode, a ferroelectric layer, a channel layer, first and second blocking layers, and source/drain electrodes. The ferroelectric layer is disposed at a side of the gate electrode. The channel layer is capacitively coupled to the gate electrode through the ferroelectric layer. The first and second blocking layers are disposed between the ferroelectric layer and the channel layer. The second blocking layer is disposed between the first blocking layer and the channel layer. The first and second blocking layers comprise a same material, and the second blocking layer is further incorporated with nitrogen. The source/drain electrodes are disposed at opposite sides of the gate electrode, and electrically connected to the channel layer.
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