Invention Grant
- Patent Title: Protection system for switches in direct drive circuits of substrate processing systems
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Application No.: US18009575Application Date: 2021-06-10
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Publication No.: US12261029B2Publication Date: 2025-03-25
- Inventor: Maolin Long , Yuhou Wang , Michael John Martin , Alexander Miller Paterson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: PENILLA IP, APC
- International Application: PCT/US2021/036827 WO 20210610
- International Announcement: WO2021/257374 WO 20211223
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G01R27/08 ; H02J50/20

Abstract:
A direct drive system for providing RF power to a component of a substrate processing system includes a direct drive circuit including a switch and configured to supply RF power to the component. A switch protection module is configured to monitor a load current and a load voltage in a processing chamber, calculate load resistance based on the load current and the load voltage, compare the load resistance to a first predetermined load resistance, and adjust at least one of an RF power limit and an RF current limit of the direct drive circuit based on the comparison.
Public/Granted literature
- US20230245873A1 Protection System for Switches in Direct Drive Circuits of Substrate Processing Systems Public/Granted day:2023-08-03
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