Invention Grant
- Patent Title: Vertical DRAM structure and method
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Application No.: US17668770Application Date: 2022-02-10
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Publication No.: US12302553B2Publication Date: 2025-05-13
- Inventor: Chia-Ta Yu , Bo-Feng Young , Hung Wei Li , Sai-Hooi Yeong , Chi On Chui
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L29/10

Abstract:
Embodiments of the present disclosure provide a side-channel dynamic random access memory (DRAM) cell and cell array that utilizes a vertical design with side channel transistors. A dielectric layer disposed over a substrate. A gate electrode is embedded in the dielectric layer. A channel layer wraps the gate electrode and a conductive structure is adjacent to the channel layer, with the channel layer interposed between the gate electrode and the conductive structure. The semiconductor structure also includes a dielectric structure disposed over the conductive structure and the gate electrode, the channel layer extending up through the dielectric structure.
Public/Granted literature
- US20220406784A1 VERTICAL DRAM STRUCTURE AND METHOD Public/Granted day:2022-12-22
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