Invention Application
US20020000378A1 Method, chemistry, and apparatus for high deposition rate solder electroplating on a microelectronic workpiece
失效
用于在微电子工件上的高沉积速率焊料电镀的方法,化学和设备
- Patent Title: Method, chemistry, and apparatus for high deposition rate solder electroplating on a microelectronic workpiece
- Patent Title (中): 用于在微电子工件上的高沉积速率焊料电镀的方法,化学和设备
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Application No.: US09884003Application Date: 2001-06-18
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Publication No.: US20020000378A1Publication Date: 2002-01-03
- Inventor: Robert W. Batz, JR. , Scot Conrady , Thomas L. Ritzdorf
- Applicant: Semitool, Inc.
- Applicant Address: null
- Assignee: Semitool, Inc.
- Current Assignee: Semitool, Inc.
- Current Assignee Address: null
- Main IPC: C25D003/60
- IPC: C25D003/60 ; C25D021/12

Abstract:
The present invention is directed to an improved electroplating method, chemistry, and apparatus for selectively depositing tin/lead solder bumps and other structures at a high deposition rate pursuant to manufacturing a microelectronic device from a workpiece, such as a semiconductor wafer. An apparatus for plating solder on a microelectronic workpiece in accordance with one aspect of the present invention comprises a reactor chamber containing an electroplating solution having free ions of tin and lead for plating onto the workpiece. A chemical delivery system is used to deliver the electroplating solution to the reactor chamber at a high flow rate. A workpiece support is used that includes a contact assembly for providing electroplating power to a surface at a side of the workpiece that is to be plated. The contact contacts the workpiece at a large plurality of discrete contact points that isolated from exposure to the electroplating solution. An anode, preferably a consumable anode, is spaced from the workpiece support within the reaction chamber and is in contact with the electroplating solution. In accordance with one embodiment the electroplating solution comprises a concentration of a lead compound, a concentration of a tin compound, water and methane sulfonic acid.
Public/Granted literature
- US06669834B2 Method for high deposition rate solder electroplating on a microelectronic workpiece Public/Granted day:2003-12-30
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