Invention Application
- Patent Title: Chuck for holding a device under test
- Patent Title (中): 夹住被测设备的卡盘
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Application No.: US09877823Application Date: 2001-06-07
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Publication No.: US20020027433A1Publication Date: 2002-03-07
- Inventor: John Dunklee
- Applicant: Cascade Microtech, Inc.
- Applicant Address: null
- Assignee: Cascade Microtech, Inc.
- Current Assignee: Cascade Microtech, Inc.
- Current Assignee Address: null
- Main IPC: G01R001/00
- IPC: G01R001/00
Abstract:
A chuck for a probe station.
Public/Granted literature
- US06965226B2 Chuck for holding a device under test Public/Granted day:2005-11-15
Information query
