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公开(公告)号：US20020027433A1
公开(公告)日：2002-03-07
申请号：US09877823
申请日：2001-06-07
Applicant: Cascade Microtech, Inc.
Inventor： John Dunklee
IPC: G01R001/00
CPC classification number: H01L21/68785 , G01R31/2887 , Y10T279/11 , Y10T279/35
Abstract: A chuck for a probe station.
Abstract translation: 用于探针台的卡盘
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