Invention Application
- Patent Title: Method of manufacturing a transistor
- Patent Title (中): 制造晶体管的方法
-
Application No.: US10095872Application Date: 2002-03-12
-
Publication No.: US20020132401A1Publication Date: 2002-09-19
- Inventor: Martin J. Powell
- Applicant: U.S. PHILIPS CORPORATION
- Applicant Address: null
- Assignee: U.S. PHILIPS CORPORATION
- Current Assignee: U.S. PHILIPS CORPORATION
- Current Assignee Address: null
- Priority: GB9929614.7 19991215
- Main IPC: H01L021/00
- IPC: H01L021/00 ; H01L021/84

Abstract:
A method of manufacturing a thin film transistor (TFT) is disclosed comprising source and drain electrodes joined by a semiconductor channel layer, a gate insulating layer formed from at least two sublayers and a gate electrode. The method comprising the steps of forming the gate insulating layer by depositing a thin film sublayer using a thin film technique; and depositing a printed sublayer by printing, wherein the thin film sublayer is located adjacent the semiconductor channel layer. The TFT may be a top gate TFT wherein the thin film sublayer is formed on the semiconductor channel layer, and wherein the printed sublayer is formed over the thin film sublayer. Alternatively, the TFT may be a bottom gate TFT wherein the printed sublayer is formed over the gate electrode; wherein the thin film sublayer is formed over the printed sublayer, and wherein the semiconductor channel layer is formed on the thin film sublayer.
Public/Granted literature
- US06759711B2 Method of manufacturing a transistor Public/Granted day:2004-07-06
Information query