Invention Application
- Patent Title: Active matrix substrate for liquid crystal display and its fabrication
- Patent Title (中): 有源矩阵基板用于液晶显示及其制造
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Application No.: US10151544Application Date: 2002-05-20
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Publication No.: US20020176032A1Publication Date: 2002-11-28
- Inventor: Akitoshi Maeda , Hiroaki Tanaka , Shigeru Kimura , Satoshi Kimura
- Applicant: NEC Corporation
- Applicant Address: null
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: null
- Priority: JP2001-150092 20010518
- Main IPC: G02F001/136
- IPC: G02F001/136
Abstract:
An active matrix substrate comprises a matrix array of TFTs. A double-layered film includes an under-layer of aluminum-neodymium (AlnullNd) alloy and an over-layer of high melting point metal. The double-layered film forms first interconnection lines for connection to the TFTs. A triple-layered film includes an under-layer of said high melting point metal, a middle-layer of said AlnullNd alloy and an over-layer of the high melting point metal. The triple-layered film forms second interconnection lines for connection to the TFTs.
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