Invention Application
- Patent Title: Multi-process system
- Patent Title (中): 多进程系统
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Application No.: US09907485Application Date: 2001-07-16
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Publication No.: US20030010352A1Publication Date: 2003-01-16
- Inventor: Eric Bergman , Dana Scranton , Eric Lund , Worm Lund
- Applicant: Semitool, Inc.
- Applicant Address: null
- Assignee: Semitool, Inc.
- Current Assignee: Semitool, Inc.
- Current Assignee Address: null
- Main IPC: B08B003/12
- IPC: B08B003/12 ; B08B003/04 ; B08B007/04

Abstract:
A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.
Public/Granted literature
- US06691720B2 Multi-process system with pivoting process chamber Public/Granted day:2004-02-17
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