Invention Application
- Patent Title: Method and composition for polishing a substrate
- Patent Title (中): 抛光基材的方法和组合物
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Application No.: US10378097Application Date: 2003-02-26
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Publication No.: US20030178320A1Publication Date: 2003-09-25
- Inventor: Feng Q. Liu , Stan D. Tsai , Yongqi Hu , Siew S. Neo , Yan Wang , Alain Duboust , Liang-Yuh Chen
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: null
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: null
- Main IPC: C25F003/00
- IPC: C25F003/00 ; B23H007/00 ; B23H009/00

Abstract:
Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 3 and about 10, a polishing enhancing material selected from the group of abrasive particles, one or more oxidizers, and combinations thereof, and a solvent. The composition may be used in an conductive material removal process including disposing a substrate having a conductive material layer formed thereon in a process apparatus comprising an electrode, providing the composition between the electrode and substrate, applying a bias between the electrode and the substrate, and removing conductive material from the conductive material layer.
Public/Granted literature
- US07128825B2 Method and composition for polishing a substrate Public/Granted day:2006-10-31
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