发明申请
- 专利标题: Methods and apparatus for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging
- 专利标题(中): 通过薄膜沉积和成像制造电子和机电元件和器件的方法和装置
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申请号: US10646146申请日: 2003-08-22
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公开(公告)号: US20040035605A1公开(公告)日: 2004-02-26
- 发明人: Saul Griffith , Joseph M. Jacobson , Scott Manalis
- 申请人: Massachusetts Institute of Technology
- 申请人地址: MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: MA Cambridge
- 主分类号: H05K001/09
- IPC分类号: H05K001/09 ; H05K001/00 ; G03F007/20 ; G03F007/16 ; G03F007/26
摘要:
Electrically (and, possibly, mechanically) active patterns are applied using a colloidal suspension of nanoparticles that exhibit a desired electrical characteristic. The nanoparticles are surrounded by an insulative shells that may be removed by therefrom by application of energy (e.g., in the form of electromagnetic radiation or heat). The nanoparticle suspension is applied to a surface, forming a layer that is substantially insulative owing to the nanoparticle shells. The applied suspension is exposed to energy to remove the capping groups and fuse the particles into cohesion. If the nanoparticle suspension was deposited as a uniform film, the energy is applied in a desired pattern so that unexposed areas remain insulative while exposed areas exhibit the electrical behavior associated with the nanoparticles. If the nanoparticle suspension was deposited in a desired pattern, it may be uniformly exposed to energy. Additional layers may be applied in the same manner, one over the other, to form a multilayer device.
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