发明申请
- 专利标题: Method to control device threshold of SOI MOSFET'S
- 专利标题(中): 控制SOI MOSFET的器件阈值的方法
-
申请号: US10235147申请日: 2002-09-05
-
公开(公告)号: US20040046207A1公开(公告)日: 2004-03-11
- 发明人: Robert H. Dennard , Wilfried E. Haensch , Hussein I. Hanafi
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY ARMONK
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY ARMONK
- 主分类号: H01L027/01
- IPC分类号: H01L027/01 ; H01L027/12 ; H01L031/0392
摘要:
A method of forming a silicon-on-insulator (SOI) metal oxide semiconductor field effect transistor (MOSFET) device is provided in which an implanted back-gate is formed into a Si-containing layer of an SOI wafer. The implanted back-gate thus formed is capable of controlling the threshold voltage of a polysilicon-containing front-gate which is formed over a portion of the implanted back-gate region. The implanted back-gate functions as a dynamic threshold voltage control system in the SOI MOSFET device because it is suitable for use during circuit/system active periods and during circuit/system idle periods.
公开/授权文献
- US06812527B2 Method to control device threshold of SOI MOSFET's 公开/授权日:2004-11-02
信息查询