发明申请
- 专利标题： Barium titanate film synthesizing process
- 专利标题（中）： 钛酸钡薄膜合成工艺
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申请号： US10612007申请日： 2003-07-03
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公开(公告)号： US20050003078A1公开(公告)日： 2005-01-06
- 发明人: Fu-Hsing Lu , Chu-Tsun Wu
- 申请人： Fu-Hsing Lu , Chu-Tsun Wu
- 申请人地址： TW TAICHUNG
- 专利权人： NATIONAL CHUNGHSING UNIVERSITY
- 当前专利权人： NATIONAL CHUNGHSING UNIVERSITY
- 当前专利权人地址： TW TAICHUNG
- 主分类号： C23C14/16
- IPC分类号： C23C14/16 ; C23C14/58 ; C25D11/26 ; H05K1/16 ; B05D5/12
摘要：
A new technique to synthesize barium titanate (BaTiO3) on homogeneous substrates (titanium) or heterogeneous substrates (silicon wafers, metal, glass, ceramics, polymers, other metals, etc.) is disclosed to include a first step to deposit a titanium film on a substrate by sputtering, and a second step to synthesize barium titanate film with uniformly dispersed spherical particles on the titanium-coated substrate in a electrolyte containing barium ions by electrochemically anodic oxidation.
公开/授权文献
- US07077943B2 Barium titanate film synthesizing process 公开/授权日：2006-07-18
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