发明申请
- 专利标题: Methods of forming patterned reticles
- 专利标题(中): 形成图案化掩模版的方法
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申请号: US10912029申请日: 2004-08-04
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公开(公告)号: US20050008949A1公开(公告)日: 2005-01-13
- 发明人: H. Dulman , William Stanton , John Futrell
- 申请人: H. Dulman , William Stanton , John Futrell
- 主分类号: G03C5/00
- IPC分类号: G03C5/00 ; G03F1/00 ; G03F1/36 ; G03F9/00 ; G06F17/50
摘要:
The invention includes methods of forming patterned reticles. Design features can be introduced into a layout for a reticle prior to optical proximity correction, and then removed prior to taping a pattern onto the reticle. Design features can alternatively, or additionally, be introduced after optical proximity correction and asymmetrically relative to one or more parts of a reticle pattern. The introduced features can subsequently be taped to the reticle as part of the formation of the patterned reticle.
公开/授权文献
- US07073161B2 Methods of forming patterned reticles 公开/授权日:2006-07-04
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