发明申请
US20050008949A1 Methods of forming patterned reticles 失效
形成图案化掩模版的方法

Methods of forming patterned reticles
摘要:
The invention includes methods of forming patterned reticles. Design features can be introduced into a layout for a reticle prior to optical proximity correction, and then removed prior to taping a pattern onto the reticle. Design features can alternatively, or additionally, be introduced after optical proximity correction and asymmetrically relative to one or more parts of a reticle pattern. The introduced features can subsequently be taped to the reticle as part of the formation of the patterned reticle.
公开/授权文献
信息查询
0/0