发明申请
US20050013087A1 MEMS tunable capacitor based on angular vertical comb drives
失效
基于角度垂直梳齿驱动的MEMS可调电容器
- 专利标题: MEMS tunable capacitor based on angular vertical comb drives
- 专利标题(中): 基于角度垂直梳齿驱动的MEMS可调电容器
-
申请号: US10850958申请日: 2004-05-21
-
公开(公告)号: US20050013087A1公开(公告)日: 2005-01-20
- 发明人: Ming Wu , Hung Nguyen , Doo-Young Hah , Pamela Patterson
- 申请人: Ming Wu , Hung Nguyen , Doo-Young Hah , Pamela Patterson
- 专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 主分类号: B81B5/00
- IPC分类号: B81B5/00 ; H01G5/06 ; H01G5/00
摘要:
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
公开/授权文献
信息查询