发明申请
US20050013087A1 MEMS tunable capacitor based on angular vertical comb drives 失效
基于角度垂直梳齿驱动的MEMS可调电容器

MEMS tunable capacitor based on angular vertical comb drives
摘要:
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.
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