发明申请
US20050014653A1 Methods for forming superconductor articles and XRD methods for characterizing same
审中-公开
用于形成超导体制品的方法和用于表征其的XRD方法
- 专利标题: Methods for forming superconductor articles and XRD methods for characterizing same
- 专利标题(中): 用于形成超导体制品的方法和用于表征其的XRD方法
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申请号: US10892731申请日: 2004-07-16
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公开(公告)号: US20050014653A1公开(公告)日: 2005-01-20
- 发明人: Jodi Reeves , David Gibson , Walter Gibson , Huapeng Huang
- 申请人: Jodi Reeves , David Gibson , Walter Gibson , Huapeng Huang
- 专利权人: SuperPower, Inc.,X-Ray Optical Systems, Inc.
- 当前专利权人: SuperPower, Inc.,X-Ray Optical Systems, Inc.
- 主分类号: C10F5/00
- IPC分类号: C10F5/00 ; C30B23/02 ; C30B29/22 ; H01L20060101
摘要:
A method for forming a superconductive article is disclosed. According to one method, a substrate is provided, the substrate having an aspect ratio of not less than about 1×103, forming a buffer layer overlying the substrate, forming a superconductor layer overlying the buffer layer, and characterizing at least one of the substrate, the buffer layer and the superconductor layer by x-ray diffraction. In this regard, x-ray diffraction is carried out such that data are taken at multiple phi angles. Data acquisition at multiple phi angles permits robust characterization of the film or layer subject to characterization, and such data may be utilized for process control and/or quality control. Additional methods for forming superconductive articles, and for characterizing same with XRD are also disclosed.
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