发明申请
- 专利标题： Insulating tube, semiconductor device employing the tube, and method of manufacturing the same
- 专利标题（中）： 绝缘管，采用该管的半导体器件及其制造方法
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申请号： US10693504申请日： 2003-10-27
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公开(公告)号： US20050023690A1公开(公告)日： 2005-02-03
- 发明人: Tsuyoshi Matsumura , Takahito Nakajima , Hiroshi Kawamoto , Mikie Miyasato , Yoshihiro Uozumi
- 申请人： Tsuyoshi Matsumura , Takahito Nakajima , Hiroshi Kawamoto , Mikie Miyasato , Yoshihiro Uozumi
- 优先权： JPP2003-202486 20030728
- 主分类号： H01L21/316
- IPC分类号： H01L21/316 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L21/44 ; H01L23/48
摘要：
An insulating tube includes a underlying insulating film, a first sidewall insulating film disposed on the underlying insulating film, a second sidewall insulating film disposed on the underlying insulating film, opposite to the first sidewall insulating film so as to provide a cavity between the first and second sidewall insulating films having the same height as the first sidewall insulating film, and an upper insulating film provided over the first and second sidewall insulating films.
公开/授权文献
- US06995472B2 Insulating tube 公开/授权日：2006-02-07
信息查询
IPC分类:
