Invention Application
US20050029611A1 Image sensor comprising thin film transistor optical sensor having offset region and method of manufacturing the same
有权
图像传感器包括具有偏移区域的薄膜晶体管光学传感器及其制造方法
- Patent Title: Image sensor comprising thin film transistor optical sensor having offset region and method of manufacturing the same
- Patent Title (中): 图像传感器包括具有偏移区域的薄膜晶体管光学传感器及其制造方法
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Application No.: US10732320Application Date: 2003-12-09
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Publication No.: US20050029611A1Publication Date: 2005-02-10
- Inventor: Jin Jang , Ji Hur , Hyun Nam
- Applicant: Jin Jang , Ji Hur , Hyun Nam
- Priority: KR2003-54468 20030806
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/146 ; H01L31/0376 ; H01L31/10 ; H01L31/0232

Abstract:
The present invention relates to an image sensor comprising an amorphous silicon thin-film transistor optical sensor which functions as an image sensor used for an X-ray photography device, a fingerprint recognition apparatus, a scanner, etc., and a method of manufacturing the image sensor. Since the thin-film transistor optical sensor according to the present invention has a high-resistance silicon region by disposing an offset region in a channel region, a dark leakage current of the optical sensor remains in a low level even under a high voltage. Therefore, it is possible to apply a high voltage to the thin-film transistor optical sensor according to the present invention so that the image senor can be sensitive to a weak light. In addition, since the storage capacitance in the image sensor is formed in a double structure, the image sensor has a high value of capacitance. Furthermore, since a lower common electrode is electrically connected to an upper common electrode, the image sensor has a stable structure.
Public/Granted literature
- US06952022B2 Image sensor comprising thin film transistor optical sensor having offset region Public/Granted day:2005-10-04
Information query
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