Invention Application
US20050046311A1 Method of manufacturing ultrasound transducer device having acoustic backing
有权
制造具有声学背衬的超声波换能器装置的方法
- Patent Title: Method of manufacturing ultrasound transducer device having acoustic backing
- Patent Title (中): 制造具有声学背衬的超声波换能器装置的方法
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Application No.: US10960871Application Date: 2004-10-06
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Publication No.: US20050046311A1Publication Date: 2005-03-03
- Inventor: Charles Baumgartner , David Mills , Robert Lewandowski , Lowell Smith , Douglas Wildes
- Applicant: Charles Baumgartner , David Mills , Robert Lewandowski , Lowell Smith , Douglas Wildes
- Main IPC: G01N29/24
- IPC: G01N29/24 ; A61B8/00 ; A61B8/14 ; B06B1/02 ; B06B1/06 ; B81B3/00 ; G01H11/06 ; H01L41/053 ; H01L41/08 ; H01L41/09 ; H01L41/187 ; H01L41/193 ; H02N2/00 ; H04R1/32 ; H04R17/00 ; H04R19/00

Abstract:
An ultrasonic transducer device comprising: an ultrasonic transducer array micromachined on a substrate; flexible electrical connections connected to the transducer array; and a body of acoustically attenuative material that supports the substrate and the flexible electrical connections. The acoustic backing material may contain additional features, such as tabs or notches, for use in positioning the transducer on fixtures during manufacturing or positioning the transducer within a housing during final assembly. Tabs or other features that are used only during manufacturing may be subsequently removed from the device. The MUT device itself may also be thinned so as to provide flexibility as desired. The backing material is preferably matched in acoustic impedance to the silicon wafer so as to prevent reflection at the interface of any acoustic energy propagating rearward, i.e., in the direction away from the device front surface. The backing material may also possess a high thermal conductivity to assist in removal of heat from the device.
Public/Granted literature
- US07441321B2 Method of manufacturing ultrasound transducer device having acoustic backing Public/Granted day:2008-10-28
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