发明申请
- 专利标题: Method of forming an embedded read element
- 专利标题(中): 形成嵌入式读取元素的方法
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申请号: US10666679申请日: 2003-09-19
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公开(公告)号: US20050063103A1公开(公告)日: 2005-03-24
- 发明人: Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
- 申请人: Meng Ding , Kuok Ho , Tsann Lin , Huey-Ming Tzeng
- 专利权人: Hitachi Global Storage Technologies
- 当前专利权人: Hitachi Global Storage Technologies
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; B24B49/10 ; G11B5/39 ; G11B5/33 ; B24B49/00 ; B24B51/00 ; G11B5/127
摘要:
A method of forming an embedded read element is used in the fabrication process of a magnetic head assembly including write and read heads. In this method, three photolithographic patterning steps are applied for defining the designed height of the embedded read element, defining its designed width, and connecting it with conducting layers, respectively. An in-line lapping guide is also formed with a spacing in front of the embedded read element. In this method, two mechanical lapping steps are applied, one monitored by measuring the resistance of a parallel circuit of the embedded read element and the in-line lapping guide, and the other monitored by measuring the GMR response of the embedded read element.
公开/授权文献
- US07062838B2 Method of forming an embedded read element 公开/授权日:2006-06-20
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