发明申请
US20050074976A1 Method for polishing copper layer and method for forming copper layer wiring using the same
审中-公开
铜层的研磨方法及使用其的铜层布线的形成方法
- 专利标题: Method for polishing copper layer and method for forming copper layer wiring using the same
- 专利标题(中): 铜层的研磨方法及使用其的铜层布线的形成方法
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申请号: US10733650申请日: 2003-12-11
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公开(公告)号: US20050074976A1公开(公告)日: 2005-04-07
- 发明人: Hyung Kim
- 申请人: Hyung Kim
- 优先权: KR2003-69539 20031007
- 主分类号: B24B37/00
- IPC分类号: B24B37/00 ; C09K3/14 ; H01L21/28 ; H01L21/302 ; H01L21/304 ; H01L21/3205 ; H01L21/321 ; H01L21/768 ; H01L23/52 ; H01L23/532
摘要:
Disclosure is a method for polishing a copper layer and a method for forming a copper layer wiring using the same. The method for polishing the copper layer is carried out through a CMP process by using slurry having a polishing rate of at least 10,000 Å/min. The method for forming the copper layer wiring includes a step of forming a sacrificial layer pattern having a trench on a substrate. Then, the copper layer is continuously formed on a sidewall of the trench, a bottom surface of the trench, and on the sacrificial layer pattern. Then, the copper layer is polished so as to expose a surface of the sacrificial layer pattern by using the method. The copper layer is effectively polished when the method is applied to a polishing process of the copper layer.
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