Invention Application
- Patent Title: Apparatus for producing metal oxide
- Patent Title (中): 用于生产金属氧化物的装置
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Application No.: US11016467Application Date: 2004-12-17
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Publication No.: US20050098112A1Publication Date: 2005-05-12
- Inventor: Tadashi Arii , Akira Kishi
- Applicant: Tadashi Arii , Akira Kishi
- Applicant Address: JP Tokyo
- Assignee: RIGAKU CORPORATION
- Current Assignee: RIGAKU CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2001-338006 20011102
- Main IPC: C01B13/18
- IPC: C01B13/18 ; B01J10/00 ; B01J10/02 ; C01G1/02 ; C01G3/02 ; C01G9/02 ; C01G9/03 ; C01G11/00 ; C01G15/00 ; H01L21/316 ; C23C16/00
Abstract:
An apparatus for producing metal oxide comprising (a) a water vapor generator for generating a water-vapor containing gas with a desired partial pressure of water vapor; and (b) heating equipment for heating a metal salt of a carboxylic acid, the metal salt of the carboxylic acid being disposed in a sample vessel, to a predetermined temperature in a water-vapor-containing gas which is introduced from said water vapor generator.
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