Invention Application
- Patent Title: PLASMA SOURCE WITH SEGMENTED MAGNETRON CATHODE
- Patent Title (中): 等离子体源与分离的MAGNETRON CATHODE
-
Application No.: US10710946Application Date: 2004-08-13
-
Publication No.: US20050103620A1Publication Date: 2005-05-19
- Inventor: Roman Chistyakov
- Applicant: Roman Chistyakov
- Applicant Address: US MA Mansfield
- Assignee: ZOND, Inc.
- Current Assignee: ZOND, Inc.
- Current Assignee Address: US MA Mansfield
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/34 ; C23C14/35 ; C23C14/54 ; H01J37/34 ; C23C14/32

Abstract:
A plasma source includes a chamber for containing a feed gas. An anode is positioned in the chamber. A segmented magnetron cathode comprising a plurality of electrically isolated magnetron cathode segments is positioned in the chamber proximate to the anode. A power supply is electrically connected to an electrical in-put of a switch. A respective one of the plurality of electrical out-puts of the switch is electrically connected to a respective one of the plurality of magnetron cathode segments. The power supply generates a train of voltage pulses that ignites a plasma from the feed gas. Individual voltage pulses in the train of voltage pulses are routed by the switch in a predetermined sequence to at least two of the plurality of magnetron cathode segments.
Information query
IPC分类: