发明申请
- 专利标题: Gate-contact structure and method for forming the same
- 专利标题(中): 栅极接触结构及其形成方法
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申请号: US11029832申请日: 2005-01-04
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公开(公告)号: US20050118798A1公开(公告)日: 2005-06-02
- 发明人: Sun-Young Kim , Woon-Kyung Lee , Dong-Whee Kwon
- 申请人: Sun-Young Kim , Woon-Kyung Lee , Dong-Whee Kwon
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 优先权: KR2001-74862 20011129
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/60 ; H01L21/768 ; H01L29/788 ; H01L21/4763
摘要:
A gate-contact structure and a method for forming the same are provided. The structure includes a device isolation layer pattern formed at a semiconductor substrate to define an active region; and a gate electrode and a capping pattern, which are sequentially stacked on the semiconductor substrate across the device isolation layer pattern. The capping pattern includes a first gate contact hole that exposes a top surface of the gate electrode. An interlayer insulation layer pattern including a second gate contact hole is disposed to cover an entire surface of the semiconductor substrate including the gate electrode and the capping pattern. The second gate contact hole penetrates the first gate contact hole to expose the top surface of the gate electrode. A gate contact plug is disposed to be connected to the top surface of the gate electrode through the second gate contact hole. Accordingly, the interlayer insulation layer pattern is intervened between the gate contact plug and a sidewall of the capping pattern.
公开/授权文献
- US07015087B2 Gate-contact structure and method for forming the same 公开/授权日:2006-03-21
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