发明申请
- 专利标题: Objective with fluoride crystal lenses
- 专利标题(中): 目标是氟化物晶体镜片
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申请号: US11029788申请日: 2005-01-05
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公开(公告)号: US20050122594A1公开(公告)日: 2005-06-09
- 发明人: Daniel Krahmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christoph Zaczek
- 申请人: Daniel Krahmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christoph Zaczek
- 专利权人: Carl Zeiss SMT AG, a Germany corporation
- 当前专利权人: Carl Zeiss SMT AG, a Germany corporation
- 优先权: DE10123725.1 20010515; DE10123727.8 20010515; DE10125487.3 20010523; DE10127320.7 20010606; DE10210782.3 20020312
- 主分类号: G02B13/24
- IPC分类号: G02B13/24 ; G02B1/02 ; G02B5/30 ; G02B17/08 ; G03F7/20 ; H01L21/027 ; G02B27/28
摘要:
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis of the crystal lens is oriented substantially perpendicular to the {100}-planes or {100}-equivalent crystallographic planes of the fluoride crystal. If two or more fluoride crystal lenses are used, they should have lens axes oriented in the (100)-, (111)-, or (110)-direction of the crystallographic structure, and they should be oriented at rotated positions relative to each other. The birefringence-related effects are further reduced by using groups of mutually rotated (100)-lenses in combination with groups of mutually rotated (111)- or (110)-lenses. A further improvement is also achieved by applying a compensation coating to at least one optical element of the objective.
公开/授权文献
- US07126765B2 Objective with fluoride crystal lenses 公开/授权日:2006-10-24
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