Invention Application
- Patent Title: Objective with fluoride crystal lenses
- Patent Title (中): 目标是氟化物晶体镜片
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Application No.: US11029788Application Date: 2005-01-05
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Publication No.: US20050122594A1Publication Date: 2005-06-09
- Inventor: Daniel Krahmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christoph Zaczek
- Applicant: Daniel Krahmer , Toralf Gruner , Wilhelm Ulrich , Birgit Enkisch , Michael Gerhard , Martin Brunotte , Christian Wagner , Winfried Kaiser , Manfred Maul , Christoph Zaczek
- Assignee: Carl Zeiss SMT AG, a Germany corporation
- Current Assignee: Carl Zeiss SMT AG, a Germany corporation
- Priority: DE10123725.1 20010515; DE10123727.8 20010515; DE10125487.3 20010523; DE10127320.7 20010606; DE10210782.3 20020312
- Main IPC: G02B13/24
- IPC: G02B13/24 ; G02B1/02 ; G02B5/30 ; G02B17/08 ; G03F7/20 ; H01L21/027 ; G02B27/28

Abstract:
An objective for a microlithography projection system has at least one fluoride crystal lens. The effects of birefringence, which are detrimental to the image quality, are reduced if the lens axis of the crystal lens is oriented substantially perpendicular to the {100}-planes or {100}-equivalent crystallographic planes of the fluoride crystal. If two or more fluoride crystal lenses are used, they should have lens axes oriented in the (100)-, (111)-, or (110)-direction of the crystallographic structure, and they should be oriented at rotated positions relative to each other. The birefringence-related effects are further reduced by using groups of mutually rotated (100)-lenses in combination with groups of mutually rotated (111)- or (110)-lenses. A further improvement is also achieved by applying a compensation coating to at least one optical element of the objective.
Public/Granted literature
- US07126765B2 Objective with fluoride crystal lenses Public/Granted day:2006-10-24
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