发明申请
- 专利标题: THREE-DIMENSIONAL MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF
- 专利标题(中): 三维存储器结构及其制造方法
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申请号: US10906779申请日: 2005-03-07
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公开(公告)号: US20050133883A1公开(公告)日: 2005-06-23
- 发明人: Erh-Kun Lai , Ming-Chung Liang
- 申请人: Erh-Kun Lai , Ming-Chung Liang
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L21/822 ; H01L21/8242 ; H01L23/525 ; H01L27/06 ; H01L29/00
摘要:
A three-dimensional memory structure and manufacturing method thereof is provided. A first stack layer is formed over a substrate. The first stack layer includes, from the substrate upwards, an n-type polysilicon layer, a conductive layer, an anti-fuse and another n-type polysilicon layer. The first stack layer is patterned to form a first stack circuit. Thereafter, a second stack layer is formed over the first stack circuit. The second stack layer includes, from the first stack circuit upwards, a p-type polysilicon layer, a conductive layer, an anti-fuse and another p-type polysilicon. The second stack layer is patterned to form a second stack circuit that crosses over the first stack circuit perpendicularly. The aforementioned steps are repeated to form more stack circuits above the substrate and hence produce a three-dimensional structure.
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