发明申请
- 专利标题: Membrane probing system
- 专利标题(中): 膜探测系统
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申请号: US11036739申请日: 2005-01-14
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公开(公告)号: US20050136562A1公开(公告)日: 2005-06-23
- 发明人: Reed Gleason , Michael Bayne , Kenneth Smith , Timothy Lesher , Martin Koxxy
- 申请人: Reed Gleason , Michael Bayne , Kenneth Smith , Timothy Lesher , Martin Koxxy
- 主分类号: H01R13/24
- IPC分类号: H01R13/24 ; H01R43/16 ; H01L21/66 ; G01R31/02 ; G01R31/26 ; H01K3/10
摘要:
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
公开/授权文献
- US07266889B2 Membrane probing system 公开/授权日:2007-09-11
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