公开(公告)号：US07266889B2

公开(公告)日：2007-09-11

申请号：US11036739

申请日：2005-01-14

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： H01R43/16

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

摘要翻译： 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平整的整个表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

公开(公告)号：US06860009B2

公开(公告)日：2005-03-01

申请号：US09814584

申请日：2001-03-22

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： H01R13/24 ,  H01R43/16

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.

摘要翻译： 一种构建探针的方法，其包括提供衬底并在衬底内产生第一基本不对称的凹槽。 导电材料位于凹槽内，导电迹线与导电材料电连接。 膜支撑导电迹线，其中导电材料位于膜和基底之间。 将衬底从导电材料上去除。

公开(公告)号：US06708386B2

公开(公告)日：2004-03-23

申请号：US09814593

申请日：2001-03-22

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： G01R100

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

摘要翻译： 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平坦的总体表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

公开(公告)号：US07761986B2

公开(公告)日：2010-07-27

申请号：US10705014

申请日：2003-11-10

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： H01R43/20

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A method of probing an electrical device using a membrane probing system having an improved contact. A membrane probe forms a contact having a ridge with a pair of inclined surfaces defining an acute angle such that, when pressed into an electrical pad of a device to be tested, the ridge penetrates into the electrical pad, shearing away any oxide on the surface of the pad. The device may then be tested.

摘要翻译： 使用具有改进的接触的膜探测系统探测电子装置的方法。 膜探针形成具有脊的触点，所述脊具有限定为锐角的一对倾斜表面，使得当被压入要测试的装置的电焊盘时，脊穿入电垫中，剪切表面上的任何氧化物 的垫。 然后可以测试该装置。

公开(公告)号：US20060284630A1

公开(公告)日：2006-12-21

申请号：US11509176

申请日：2006-08-23

申请人： Paul Tervo ,  Kenneth Smith ,  Clarence Cowan ,  Mike Dauphinais ,  Martin Koxxy

发明人： Paul Tervo ,  Kenneth Smith ,  Clarence Cowan ,  Mike Dauphinais ,  Martin Koxxy

IPC分类号： G01R31/02

CPC分类号： G01R31/2889 ,  G01R1/06772 ,  G01R1/0735

摘要： A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.

公开(公告)号：US08451017B2

公开(公告)日：2013-05-28

申请号：US12818521

申请日：2010-06-18

申请人： K. Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： K. Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： G01R31/00 ,  G01R1/067 ,  H01R43/20

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

摘要翻译： 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平整的整个表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

公开(公告)号：US20060132157A1

公开(公告)日：2006-06-22

申请号：US11317400

申请日：2005-12-22

申请人： Warren Harwood ,  Paul Tervo ,  Martin Koxxy

发明人： Warren Harwood ,  Paul Tervo ,  Martin Koxxy

IPC分类号： G01R31/02

CPC分类号： H01L21/68785 ,  A46D1/00 ,  G01R1/06705 ,  G01R1/18 ,  G01R31/2862 ,  G01R31/2868 ,  G01R31/2886 ,  G01R31/2887 ,  H01L21/68714

摘要： A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.

公开(公告)号：US20050007131A1

公开(公告)日：2005-01-13

申请号：US10909229

申请日：2004-07-29

申请人： Paul Tervo ,  Kenneth Smith ,  Clarence Cowan ,  Mike Dauphinais ,  Martin Koxxy

发明人： Paul Tervo ,  Kenneth Smith ,  Clarence Cowan ,  Mike Dauphinais ,  Martin Koxxy

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28

CPC分类号： G01R31/2889 ,  G01R1/06772 ,  G01R1/0735

摘要： A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.

公开(公告)号：US06825677B2

公开(公告)日：2004-11-30

申请号：US09814594

申请日：2001-03-22

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： G01R3102

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material islocated within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

摘要翻译： 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平整的整个表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。

公开(公告)号：US20100271060A1

公开(公告)日：2010-10-28

申请号：US12818521

申请日：2010-06-18

申请人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

发明人： Reed Gleason ,  Michael A. Bayne ,  Kenneth Smith ,  Timothy Lesher ,  Martin Koxxy

IPC分类号： G01R1/06

CPC分类号： G01R1/0735 ,  G01R1/06733 ,  G01R1/06738 ,  G01R3/00 ,  H01R13/2414 ,  H01R13/2464 ,  H01R43/16 ,  H05K3/20 ,  H05K3/4007 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49121 ,  Y10T29/4913 ,  Y10T29/49139 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169 ,  Y10T29/49174 ,  Y10T29/49204 ,  Y10T29/49208 ,  Y10T29/49218 ,  Y10T29/49815 ,  Y10T29/49824 ,  Y10T29/49826 ,  Y10T29/53509

摘要： A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

摘要翻译： 优选由延性材料构成的基板和具有用于接触测试装置上的接触焊盘的所得装置的所需形状的工具与基板接触。 该工具优选地由比基板更硬的材料构成，使得可以容易地在其中形成凹陷。 优选图案化的电介质（绝缘）层由衬底支撑。 导电材料位于凹陷内，然后优选地研磨以从电介质层的顶表面去除多余的并提供平整的整个表面。 在电介质层和导电材料上形成迹线。 然后优选在整个表面上图案化聚酰亚胺层。 然后通过任何合适的方法去除衬底。