发明申请
US20050149803A1 Semiconductor testing equipment, testing method for semiconductor, fabrication method of semiconductor, and semiconductor memory 有权
半导体测试设备,半导体测试方法,半导体制造方法和半导体存储器

Semiconductor testing equipment, testing method for semiconductor, fabrication method of semiconductor, and semiconductor memory
摘要:
Semiconductor testing equipment according to the present invention comprises: an algorithmic pattern generator for generating a test pattern for testing a memory under test and applying the pattern to the memory under test; a comparator for comparing a response signal from the memory under test and an expected value from tho algorithmic pattern generator; a fail address acquisition part for storing an address of the memory under test (fail address) when a result compared by the comparator is failed; a fail address analysis part for analyzing the failed address and calculating the address to be repaired (repair address); and a cycle-pattern generator for redundancy processing for inserting the address to be repaired into a test pattern and applying the address to the memory under test, so that even when capacity of the semiconductor memory is increased, a fabrication yield thereof is raised by testing the memory after the packaging and by performing the redundancy processing of a defective.
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