发明申请
US20050155358A1 Method and apparatus for detecting and measuring state of fullness in cryopumps
有权
用于检测和测量低温泵充满状态的方法和装置
- 专利标题: Method and apparatus for detecting and measuring state of fullness in cryopumps
- 专利标题(中): 用于检测和测量低温泵充满状态的方法和装置
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申请号: US10763056申请日: 2004-01-21
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公开(公告)号: US20050155358A1公开(公告)日: 2005-07-21
- 发明人: Gary Ash , Allen Bartlett , James O'Neil , Bruce Andeen
- 申请人: Gary Ash , Allen Bartlett , James O'Neil , Bruce Andeen
- 申请人地址: US MA Mansfield
- 专利权人: Helix Technology Corp.
- 当前专利权人: Helix Technology Corp.
- 当前专利权人地址: US MA Mansfield
- 主分类号: B01D8/00
- IPC分类号: B01D8/00 ; F04B37/08
摘要:
The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.
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