发明申请
- 专利标题: Molybdenum-based electrode with carbon nanotube growth
- 专利标题(中): 具有碳纳米管生长的钼基电极
-
申请号: US10508362申请日: 2003-03-20
-
公开(公告)号: US20050161750A1公开(公告)日: 2005-07-28
- 发明人: Hongjie Dai , Nathan Franklin , Qian Wang
- 申请人: Hongjie Dai , Nathan Franklin , Qian Wang
- 优先权: US60366451 20020320
- 国际申请: PCT/US03/08569 WO 20030320
- 主分类号: D21H11/00
- IPC分类号: D21H11/00 ; H01L27/14 ; H01L29/06 ; H01L29/76 ; H01L29/94 ; H01L51/00 ; H01L51/05 ; H01L51/10 ; H01M20060101 ; H01M4/38 ; H01M4/60
摘要:
A carbon nanotube is formed on at least one Molybdenum-based electrode. In one embodiment, a carbon-nanotube device includes a pair of Molybdenum-based electrodes over respective terraces. Using a catalyst on the Molybdenum-based material of at least one electrode, a carbon nanotube is grown over a gap that separates the terraces to connect the Molybdenum-based electrodes. Yet other aspects of the present invention employ carbon nanotubes extending (suspended) from respective Molybdenum-based structures for use in electrically addressable devices. The nanotubes can also be formed by patterned growth to bridge such Molybdenum-based electrodes. A particular method for manufacturing this device does not require post-growth processing. Applications include, among many others, scalable nanotube transistors/switches nano-electromechanical systems.
信息查询