- 专利标题： Piezoelectric resonator, piezoelectric filter, duplexer, communication apparatus, and method for manufacturing piezoelectric resonator
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申请号： US11094622申请日： 2005-03-30
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公开(公告)号： US20050168110A1公开(公告)日： 2005-08-04
- 发明人: Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
- 申请人： Hajime Yamada , Masaki Takeuchi , Hideki Kawamura , Hiroyuki Fujino , Yukio Yoshino , Ken-ichi Uesaka , Tadashi Nomura , Daisuke Nakamura , Yoshimitsu Ushimi , Takashi Hayashi
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 优先权： JP2002-001329 20020108; JP2002-335120 20021119; JP2002-338036 20021121; JP2002-142350 20020517; JP2002-338037 20021121
- 主分类号： H03H3/02
- IPC分类号： H03H3/02 ; H03H3/04 ; H03H9/02 ; H03H9/10 ; H03H9/17 ; H03H9/56 ; H01L41/08
摘要：
A piezoelectric thin film resonator having a stabilized temperature characteristic of resonant frequency, a method for manufacturing the same, and a communication apparatus using the piezoelectric thin film resonator are provided. The piezoelectric thin film resonator is provided with a substrate having an opening, first and second insulation films which are provided on one surface of the substrate while covering the opening and which primarily include SiO2 and Al2O3, respectively, Al2O3 having oxygen defect and being in an amorphous state, and a piezoelectric thin film which is provided on the second insulation film and is sandwiched between electrodes and which primarily includes ZnO.
公开/授权文献
- US07240410B2 Method for manufacturing a piezoelectric resonator 公开/授权日：2007-07-10