Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus, all including same
    4.
    发明授权
    Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus, all including same 有权
    压电谐振器和压电滤波器,双工器和通信设备,都包括相同的

    公开(公告)号:US06914368B2

    公开(公告)日:2005-07-05

    申请号:US10317145

    申请日:2002-12-12

    摘要: A piezoelectric resonator includes a substrate and a vibrator. The vibrator includes a thin-film portion having at least one piezoelectric thin-film layer disposed on the substrate and at least one pair of upper and lower electrodes disposed on the substrate. The vibrator has a structure in which the thin-film portion is sandwiched from the upper and lower surfaces thereof by the upper and lower electrodes, which oppose each other in the depth direction, and the overlapping portion of the vibrator defined by the opposing upper and lower electrodes has a tetragonal shape, when viewed in the depth direction, other than a rectangle and a square, the tetragonal shape having substantially parallel sides having a longitudinal length equal to or smaller than about 10 times the oscillatory wavelength and also having at least one portion in which the distance between opposing electrode edges varies.

    摘要翻译: 压电谐振器包括基板和振动器。 振动器包括具有设置在基板上的至少一个压电薄膜层和设置在基板上的至少一对上下电极的薄膜部分。 振动器具有这样的结构,其中薄膜部分被其上表面和下表面夹在上下电极之间,它们在深度方向上彼此相对,并且振动器的重叠部分由相对的上部和 下部电极在深度方向上看不到矩形和正方形,四边形形状具有基本上平行的边,纵向长度等于或小于振荡波长的约10倍,并且还具有至少一个 相对电极边缘之间的距离变化的部分。