发明申请
US20050168112A1 Dielectric element, piezoelectric element, ink jet head and method for producing the same head 有权
电介质元件,压电元件,喷墨头及其制造方法

Dielectric element, piezoelectric element, ink jet head and method for producing the same head
摘要:
To provide a dielectric layer of crystal structure preferentially or uniaxially oriented on a common substrate. A dielectric element of desired quality can be stably produced even on a common substrate for film-making by forming a lower electrode layer, dielectric layer and upper electrode layer in this order on a substrate, wherein each of these layers are designed to be preferentially or uniaxially oriented, and to have a specific half bandwidth, determined by fitting a pseudo-Voigt function.
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