发明申请
- 专利标题: Method of fabricating optoelectronic integrated circuit chip
- 专利标题(中): 制造光电集成电路芯片的方法
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申请号: US11012699申请日: 2004-12-16
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公开(公告)号: US20050170549A1公开(公告)日: 2005-08-04
- 发明人: Eun Soo Nam , Ho Young Kim , Myoung Sook Oh , Dong Yun Jung , Seon Hong , Kyoung Ik Cho
- 申请人: Eun Soo Nam , Ho Young Kim , Myoung Sook Oh , Dong Yun Jung , Seon Hong , Kyoung Ik Cho
- 优先权: KR2003-94753 20031222; KR2004-57043 20040722
- 主分类号: H01L21/331
- IPC分类号: H01L21/331 ; H01L31/109 ; H01L31/11 ; H01L21/00 ; H01L29/732 ; H01L31/0328 ; H01L31/0336 ; H01L31/072
摘要:
Provided is a method of fabricating an optoelectronic integrated circuit chip. In particular, a method of fabricating an optoelectronic integrated circuit chip is provided, in which an optical absorption layer of a wave-guide type optical detector is grown to be thicker than a collector layer of a hetero-junction bipolar transistor by using a selective area growth by metal organic chemical vapor deposition (MOCVD) method, and the wave-guide type optical detector and the hetero-junction bipolar transistor are integrated as a single chip on a semi-insulated InP substrate, thereby readily realizing the wave-guide type optical detector improved in quantum efficiency and having the ultra-high speed characteristics.
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