发明申请
- 专利标题: Method and device for vibration control
- 专利标题(中): 振动控制方法及装置
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申请号: US11028686申请日: 2005-01-04
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公开(公告)号: US20050200243A1公开(公告)日: 2005-09-15
- 发明人: Ronald Spangler , Emanuele Bianchini , Baruch Pletner , Betsy Marsh , Robert Jacques
- 申请人: Ronald Spangler , Emanuele Bianchini , Baruch Pletner , Betsy Marsh , Robert Jacques
- 专利权人: Active Control Experts, Inc.
- 当前专利权人: Active Control Experts, Inc.
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; B06B1/04 ; B06B1/06 ; B06B1/08 ; F16F15/00 ; F16F15/02 ; F16F15/027 ; G03F7/20 ; G05D19/02 ; H01L21/027 ; H01L21/68 ; H01L41/047 ; H01L41/053 ; H01L41/09 ; H04R17/08 ; H01L41/08
摘要:
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.