发明申请
US20050201022A1 Novel process and structure to fabricate CPP spin valve heads for ultra-hing recording density
失效
用于制造CPP旋转阀头的新颖工艺和结构,用于超铰记录密度
- 专利标题: Novel process and structure to fabricate CPP spin valve heads for ultra-hing recording density
- 专利标题(中): 用于制造CPP旋转阀头的新颖工艺和结构,用于超铰记录密度
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申请号: US10796387申请日: 2004-03-09
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公开(公告)号: US20050201022A1公开(公告)日: 2005-09-15
- 发明人: Cheng Horng , Ru-Ying Tong
- 申请人: Cheng Horng , Ru-Ying Tong
- 专利权人: Headway Technologies, Inc.
- 当前专利权人: Headway Technologies, Inc.
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; G11B5/127 ; G11B5/33 ; G11B5/39 ; H01F10/16 ; H01F10/32 ; H01F41/18 ; H01F41/30 ; H01L43/08 ; H01L43/12
摘要:
A CPP-GMR spin value sensor structure with an improved MR ratio and increased resistance is disclosed. All layers except certain pinned layers, copper spacers, and a Ta capping layer are oxygen doped by adding a partial O2 pressure to the Ar sputtering gas during deposition. Oxygen doped CoFe free and pinned layers are made slightly thicker to offset a small decrease in magnetic moment caused by the oxygen dopant. Incorporating oxygen in the MnPt AFM layer enhances the exchange bias strength. An insertion layer such as a nano-oxide layer is included in one or more of the free, pinned, and spacer layers to increase interfacial scattering. The thickness of all layers except the copper spacer may be increased to enhance bulk scattering. A CPP-GMR single or dual spin valve of the present invention has up to a threefold increase in resistance and a 2 to 3% increase in MR ratio.
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